Research Group Charged Particle Optics

Research Group Charged Particle Optics

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Carel Heerkens
TUDelft, Faculty of Applied Sciences, Imaging Science and Technology 5046




Our research group (Deeltjesoptica in Dutch) is operating in the field of charged particle optics, which means that we manipulate beams of electrons, positrons and ions.SEM, FIB, FEBID
Electron and Ion Sources,Electron and Ion Microscopy,Electron and Ion Lithography
Dorp, van W. F.; Lazic I.; Beyer A.; Golzhauser, A; Wagner, JB; Hansen, TW, Hagen, CW; Ultrahigh resolution focused electron beam induces processing: the effect of substrate thickness. In: Nanotechnology, Volume: 22 Issue: 11, 2011. Article Number: 115303. DOI: 10.1088/0957-4484/22/11/115303Wnuk J. D.; Rosenberg S. G.; Gorham J. M.; van Dorp, WF; Hagen, C. W.; Fairbrother, DH; Electron beam deposition for nanofabrication: Insights from surface science. In: Surface Science, Vol. 605 Issue: 3-4, pp. 257-266, 2011. DOI: 10.1016/j.susc.2010.10.035Mohammadi-Gheidari, A., Kruit, P. Electron optics of multi-beam scanning electron microscope. In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 645 (1), pp. 234-240, 2011

Castaldo, V., Hagen, C.W., Kruit, P. Simulation of ion imaging: Sputtering, contrast, noise. In: Ultramicroscopy, 111 (8), pp. 982-994, 2011. In Press.

FEI Quanta 200FEG with optional confocal microscope

FEI Quanta 3D


FEI Verios 460 with SECOM for CLEM

FEI Nova Nanolab with EDX
Our equipment is available for external users. Training will be provided.
TUDelft coarse in Charged Particle Optics